Ingentec acts as an agent for MCL Electronic Materials Co., Ltd (Short for MCL) semiconductor silicon wafers. MCL is a silicon material manufacturer of manufacturing CZ silicon ingot, sliced and lapped silicon wafers, polished silicon wafers R & D, manufacture and sales.
MCL mainly produces 100mm, 125mm, 150mm and 200mm wafers, the wafer quality is guaranteed by the advanced equipment, the multiple testing methods, the high-grade facility system and the superior production environment in MCL. MCL is certificated by TS16949 quality management system, IATF16949:2016 and by ISO14001. MCL, the production scale and technical management level are in an advanced position.
Analog IC
Digital IC
4 inch
Diameter(mm):100
6 inch
Diameter(mm):150
5 inch
Diameter(mm):125
8 inch
Diameter(mm):200
PROJECT | PARAMETER VALUE | PROJECT | PARAMETER VALUE |
parameter | 100mm/125mm/150mm/200mm | Total flatness | 2.0 Microns Max |
Growth method | CZ | Total thickness change | 3.0 Microns Max |
Dopant | P , P+;Boron / N, N+;Phos.,Sb, As | Local flatness | 1.0 Microns Max |
Crystal orientation | 1-0-0 / 1-1-1 / 1-1-0 | Warpage | 30 Microns Max |
resistivity | P: 0.001-300 N: Phos. 0.0007-100 Sb. 0.006-0.02 As. 0.001-0.01 |
Curvature | 30 Microns Max |
oxygen content | 6-18PPMA(New ASTM) | thickness | Target + / -15Microns |
carbon content | 0.5PPMA Max | Number of positive particles | 0.3Microns 10Max/Wafer 0.2Microns 18Max/Wafer |
Bulk metal content | 5*1010 atoms/cm3 Max | Front of silicon wafer | Polished |
Surface metal content | 5*1010 atoms/cm2 Max | Back of silicon wafer | BSD/Poly/SiO2/Etched |
dislocation | None | Laser inscription | Hard/Soft laser marking |